منابع مشابه
Analog tunable gratings driven by thin-film piezoelectric microelectromechanical actuators.
We present a microfabricated grating whose period can be tuned in analog fashion to within a fraction of a nanometer. The tunable angular range is more than 400 microrad in the first diffracted order. The design concept consists of a diffractive grating defined onto a 400-nm membrane, with the membrane subsequently strained in the direction perpendicular to the grating grooves by thin-film piez...
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ژورنال
عنوان ژورنال: Nature
سال: 1900
ISSN: 0028-0836,1476-4687
DOI: 10.1038/061275a0